UV curing and charge erase

Trymax offers UV solutions for curing of the photoresist and erasing of charges built-up in devices during the manufacturing processes.

  • UV curing exhibits various benefits over thermal baking of the resist such as the photo stabilization of the photo-resist prior ion implantation or etch to improve the CD control, uniformity, selectivity, and overall stripping.
  • UV irradiation is as well a powerful way to efficiently neutralize charges at floating gates.

NEO 2000UV