Trymax offers UV solutions for curing of the photoresist and erasing of charges built-up in devices during the manufacturing processes.
- UV curing exhibits various benefits over thermal baking of the resist such as the photo stabilization of the photo-resist prior ion implantation or etch to improve the CD control, uniformity, selectivity, and overall stripping.
- UV irradiation is as well a powerful way to efficiently neutralize charges at floating gates.